Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814726 | Dry etching method or dry cleaning method | Katsuya Fukae, Korehito KATO | 2023-11-14 |
| 11584989 | Dry etching method or dry cleaning method | Katsuya Fukae, Korehito KATO | 2023-02-21 |