MS

Minami Shouji

HH Hitachi High-Technologies: 1 patents #104 of 389Top 30%
Overall (2023): #321,098 of 537,848Top 60%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11631568 Device defect detection method using a charged particle beam Yasuhiro Shirasaki, Natsuki Tsuno, Yohei Nakamura, Muneyuki Fukuda 2023-04-18