Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821080 | Reagents to remove oxygen from metal oxyhalide precursors in thin film deposition processes | Rocio Alejandra Arteaga Muller, Nicolas Blasco, Jean-Marc Girard, Feng Li, Venkateswara R. Pallem +1 more | 2023-11-21 |
| 11661653 | Vapor delivery systems for solid and liquid materials | — | 2023-05-30 |
| 11577967 | Tungsten pentachloride conditioning and crystalline phase manipulation | Feng Li, Sonia Plaza, Jean-Marc Girard, Nicolas Blasco | 2023-02-14 |