Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742212 | Directional deposition in etch chamber | Zhongkui Tan, Lisi Xie, Yoko Yamaguchi, Yasushi Ishikawa, Patrick Ponath +3 more | 2023-08-29 |
| 11670591 | Semiconductor device and method of fabricating same | In-Hyuk Choi, Joonhyoung Yang | 2023-06-06 |