Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810766 | Protection of aluminum process chamber components | Karthikeyan Balaraman, Sathyanarayana Bindiganavale, Rajasekhar PATIBANDLA, Balamurugan Ramasamy, Kartik Shah +3 more | 2023-11-07 |
| 11648639 | Polishing jig assembly for a new or refurbished electrostatic chuck | Wendell Glenn Boyd, Jr., Stacy Meyer | 2023-05-16 |