Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11833637 | Control of steam generation for chemical mechanical polishing | Hari Soundararajan, Shou-Sung Chang, Calvin Spencer Lee, Jonathan P. Domin, Dmitry Sklyar +3 more | 2023-12-05 |