Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11720027 | Apparatus for generating extreme ultraviolet light and lithography apparatus including the same | Injae Lee, Ohkug Kwon, Sunghyup Kim, Yongchan Kim, Jeonggil Kim +4 more | 2023-08-08 |