Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11726046 | Multi-scale spectral imaging apparatuses and methods, and methods of manufacturing semiconductor devices by using the imaging methods | Jaehwang Jung, Hyejin Shin, Wookrae Kim, Gwangsik Park, Yongju Jeon | 2023-08-15 |
| 11604136 | Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method | Jaehwang Jung, Yasuhiro Hidaka, Mitsunori Numata, Wookrae Kim, Jinseob Kim | 2023-03-14 |