Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11726046 | Multi-scale spectral imaging apparatuses and methods, and methods of manufacturing semiconductor devices by using the imaging methods | Hyejin Shin, Wookrae Kim, Gwangsik Park, Myungjun Lee, Yongju Jeon | 2023-08-15 |
| 11624699 | Measurement system capable of adjusting AOI, AOI spread and azimuth of incident light | Wookrae Kim, Myoungki Ahn, Changhyeong YOON | 2023-04-11 |
| 11604136 | Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method | Yasuhiro Hidaka, Mitsunori Numata, Wookrae Kim, Jinseob Kim, Myungjun Lee | 2023-03-14 |