Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11761906 | Optical device | Yasuhiro Hidaka | 2023-09-19 |
| 11604136 | Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement method | Jaehwang Jung, Yasuhiro Hidaka, Wookrae Kim, Jinseob Kim, Myungjun Lee | 2023-03-14 |