Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11638938 | In situ process chamber chuck cleaning by cleaning substrate | Giampietro Bieli, Shai Mark, Adi Pahima, Yoram Uziel | 2023-05-02 |
| 11607716 | Systems and methods for chuck cleaning | Shai Mark, Yoram Uziel, Giampietro Bieli, Adi Pahima | 2023-03-21 |