Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837441 | Depositing a carbon hardmask by high power pulsed low frequency RF | Pramod Subramonium, Ragesh Puthenkovilakam, Rujun Bai, David French | 2023-12-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837441 | Depositing a carbon hardmask by high power pulsed low frequency RF | Pramod Subramonium, Ragesh Puthenkovilakam, Rujun Bai, David French | 2023-12-05 |