Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11767590 | ALD cycle time reduction using process chamber lid with tunable pumping | Muhannad Mustafa, Muhammad M. Rasheed, Anqing Cui | 2023-09-26 |
| 11732358 | High temperature chemical vapor deposition lid | Muhannad Mustafa, Muhammad M. Rasheed, Srinivas Gandikota, Wei V. Tang | 2023-08-22 |
| 11719255 | Pumping liner for improved flow uniformity | Muhannad Mustafa, Muhammad M. Rasheed | 2023-08-08 |