Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756819 | Methods and apparatus for minimizing substrate backside damage | Abdul Aziz Khaja, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Yoichi Suzuki | 2023-09-12 |
| 11560623 | Methods of reducing chamber residues | Prashant Kumar Kulshreshtha, Anjana M. Patel, Abdul Aziz Khaja, Viren Kalsekar, Vinay Prabhakar +5 more | 2023-01-24 |