Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841628 | Apparatus for and method of sensing alignment marks | Justin Kreuzer | 2023-12-12 |
| 11789368 | Lithographic apparatus, metrology system, and illumination systems with structured illumination | Yuxiang Lin, Joshua Adams, Tamer Elazhary | 2023-10-17 |
| 11703771 | Variable diffraction grating | Ali ALSAQQA, Fadi El-Ghussein, Lambertus Gerardus Maria Kessels, Roxana Rezvani Naraghi, Timothy A. Brunner +1 more | 2023-07-18 |