Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11840966 | Tuning engine parameter estimator using gas path analysis data | Danbing Seto, Ramesh Rajagopalan | 2023-12-12 |
| 11789368 | Lithographic apparatus, metrology system, and illumination systems with structured illumination | Yuxiang Lin, Tamer Elazhary, Krishanu SHOME | 2023-10-17 |