Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789368 | Lithographic apparatus, metrology system, and illumination systems with structured illumination | Yuxiang Lin, Joshua Adams, Krishanu SHOME | 2023-10-17 |
| 11675192 | Hybrid coupling diffractive optical element | Michael Patrick Schaub, Byron B. Taylor | 2023-06-13 |
| 11604351 | Field bias optical element for digital projector | Yang Zhao, Nicholas Daniel Trail, Byron Taylor | 2023-03-14 |