Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11566325 | Silicon carbonitride gapfill with tunable carbon content | Mei-Yee Shek, Bhargav S. Citla, Jethro Tannos, Chentsau Chris Ying, Srinivas D. Nemani +1 more | 2023-01-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11566325 | Silicon carbonitride gapfill with tunable carbon content | Mei-Yee Shek, Bhargav S. Citla, Jethro Tannos, Chentsau Chris Ying, Srinivas D. Nemani +1 more | 2023-01-31 |