Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822238 | Extreme ultraviolet photolithography method with developer composition | An-Ren Zi, Ching-Yu Chang, Chin-Hsiang Lin | 2023-11-21 |
| 11681226 | Metal-compound-removing solvent and method in lithography | An-Ren Zi, Ching-Yu Chang | 2023-06-20 |