Issued Patents 2023
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11824454 | Wafer biasing in a plasma chamber | Kenneth E. Miller, Timothy Ziemba, John G. Carscadden, Ilia Slobodov | 2023-11-21 |
| 11810761 | Nanosecond pulser ADC system | Ilia Slobodov, John G. Carscadden, Kenneth E. Miller, Timothy Ziemba, Huatsern Yeager +5 more | 2023-11-07 |
| 11777448 | Efficient high power microwave generation using recirculating pulses | Timothy Ziemba, Kenneth E. Miller | 2023-10-03 |
| 11689107 | Nanosecond pulser bias compensation | Timothy Ziemba, Ilia Slobodov, Alex Henson, Morgan Quinley, John G. Carscadden +1 more | 2023-06-27 |
| 11670484 | Variable output impedance RF generator | Timothy Ziemba | 2023-06-06 |
| 11658007 | Apparatus and method of generating a waveform | Timothy Ziemba, Kenneth E. Miller, John G. Carscadden, Ilia Slobodov | 2023-05-23 |
| 11646176 | Efficient nanosecond pulser with source and sink capability for plasma control applications | Timothy Ziemba, Kenneth E. Miller, Ilia Slobodov | 2023-05-09 |
| 11631573 | High voltage resistive output stage circuit | Timothy Ziemba, Kenneth E. Miller, John G. Carscadden, Ilia Slobodov | 2023-04-18 |
| 11551908 | Spatially variable wafer bias power system | Timothy Ziemba, Ilia Slobodov, John G. Carscadden, Kenneth E. Miller | 2023-01-10 |
| 11542927 | Low pressure dielectric barrier discharge plasma thruster | Timothy Ziemba, John G. Carscadden, Kenneth E. Miller, Ilia Slobodov, Julian F. Picard +1 more | 2023-01-03 |