| 11824454 |
Wafer biasing in a plasma chamber |
Kenneth E. Miller, Timothy Ziemba, Ilia Slobodov, James Prager |
2023-11-21 |
| 11810761 |
Nanosecond pulser ADC system |
Ilia Slobodov, Kenneth E. Miller, Timothy Ziemba, Huatsern Yeager, Eric Hanson +5 more |
2023-11-07 |
| 11689107 |
Nanosecond pulser bias compensation |
Timothy Ziemba, Ilia Slobodov, Alex Henson, Morgan Quinley, James Prager +1 more |
2023-06-27 |
| 11658007 |
Apparatus and method of generating a waveform |
Timothy Ziemba, Kenneth E. Miller, James Prager, Ilia Slobodov |
2023-05-23 |
| 11636998 |
Nanosecond pulser pulse generation |
Timothy Ziemba, Ilia Slobodov, Kenneth E. Miller, Morgan Quinley |
2023-04-25 |
| 11631573 |
High voltage resistive output stage circuit |
Timothy Ziemba, Kenneth E. Miller, James Prager, Ilia Slobodov |
2023-04-18 |
| 11587768 |
Nanosecond pulser thermal management |
Timothy Ziemba, Ilia Slobodov, Kenneth E. Miller, Connor Liston |
2023-02-21 |
| 11551908 |
Spatially variable wafer bias power system |
Timothy Ziemba, Ilia Slobodov, Kenneth E. Miller, James Prager |
2023-01-10 |
| 11542927 |
Low pressure dielectric barrier discharge plasma thruster |
Timothy Ziemba, James Prager, Kenneth E. Miller, Ilia Slobodov, Julian F. Picard +1 more |
2023-01-03 |