Issued Patents 2023
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11824454 | Wafer biasing in a plasma chamber | Kenneth E. Miller, John G. Carscadden, Ilia Slobodov, James Prager | 2023-11-21 |
| 11824542 | Bipolar high voltage pulser | Alex Henson, Kevin Muggli, Kenneth E. Miller | 2023-11-21 |
| 11810761 | Nanosecond pulser ADC system | Ilia Slobodov, John G. Carscadden, Kenneth E. Miller, Huatsern Yeager, Eric Hanson +5 more | 2023-11-07 |
| 11777448 | Efficient high power microwave generation using recirculating pulses | James Prager, Kenneth E. Miller | 2023-10-03 |
| 11728138 | Ion current droop compensation | Christopher Bowman, Connor Liston, Kenneth E. Miller | 2023-08-15 |
| 11689107 | Nanosecond pulser bias compensation | Ilia Slobodov, Alex Henson, Morgan Quinley, John G. Carscadden, James Prager +1 more | 2023-06-27 |
| 11670484 | Variable output impedance RF generator | James Prager | 2023-06-06 |
| 11658007 | Apparatus and method of generating a waveform | Kenneth E. Miller, John G. Carscadden, James Prager, Ilia Slobodov | 2023-05-23 |
| 11646176 | Efficient nanosecond pulser with source and sink capability for plasma control applications | James Prager, Kenneth E. Miller, Ilia Slobodov | 2023-05-09 |
| 11636998 | Nanosecond pulser pulse generation | Ilia Slobodov, John G. Carscadden, Kenneth E. Miller, Morgan Quinley | 2023-04-25 |
| 11631573 | High voltage resistive output stage circuit | Kenneth E. Miller, James Prager, John G. Carscadden, Ilia Slobodov | 2023-04-18 |
| 11587768 | Nanosecond pulser thermal management | Ilia Slobodov, John G. Carscadden, Kenneth E. Miller, Connor Liston | 2023-02-21 |
| 11558048 | High voltage nanosecond pulser | Kenneth E. Miller | 2023-01-17 |
| 11551908 | Spatially variable wafer bias power system | Ilia Slobodov, John G. Carscadden, Kenneth E. Miller, James Prager | 2023-01-10 |
| 11542927 | Low pressure dielectric barrier discharge plasma thruster | James Prager, John G. Carscadden, Kenneth E. Miller, Ilia Slobodov, Julian F. Picard +1 more | 2023-01-03 |