Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11829065 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Shunya TAKI, Hiroaki IWAOKA, Daijiro AKAGI | 2023-11-28 |
| 11822229 | Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof | Daijiro AKAGI, Hirotomo Kawahara, Toshiyuki Uno, Kenichi Sasaki | 2023-11-21 |