Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822229 | Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof | Daijiro AKAGI, Toshiyuki Uno, Ichiro Ishikawa, Kenichi Sasaki | 2023-11-21 |
| 11698580 | Reflective mask blank for EUV lithography | Hiroyoshi Tanabe, Toshiyuki Uno, Hiroshi Hanekawa, Daijiro AKAGI | 2023-07-11 |