Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11703751 | Reflective mask blank and reflective mask | Tsuyoshi Kakuta, Yoichi SERA, Sadatatsu Ikeda | 2023-07-18 |
| 11698580 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Hiroyoshi Tanabe, Toshiyuki Uno, Daijiro AKAGI | 2023-07-11 |