Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11822229 | Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof | Daijiro AKAGI, Hirotomo Kawahara, Toshiyuki Uno, Ichiro Ishikawa | 2023-11-21 |
| 11760650 | Compound | Emi KAWASHIMA, Kazuyoshi Inoue, Masatoshi Shibata, Atsushi Yao | 2023-09-19 |