Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11829065 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Hiroaki IWAOKA, Daijiro AKAGI, Ichiro Ishikawa | 2023-11-28 |