Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835852 | Reflective mask blank for EUV exposure, and reflective mask | — | 2023-12-05 |
| 11698580 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Toshiyuki Uno, Hiroshi Hanekawa, Daijiro AKAGI | 2023-07-11 |