Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11674051 | Stepped substrate coating composition containing compound having curable functional group | Hikaru TOKUNAGA, Takafumi Endo, Keisuke Hashimoto, Makoto Nakajima | 2023-06-13 |
| 11635692 | Resist underlying film forming composition | Mamoru TAMURA, Takahiro Kishioka | 2023-04-25 |
| 11542366 | Composition for forming resist underlayer film and method for forming resist pattern using same | Yuki Usui, Mamoru TAMURA, Takahiro Kishioka | 2023-01-03 |