Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791185 | Side storage pods, electronic device processing systems, and methods for operating the same | Paul B. Reuter | 2023-10-17 |
| 11782404 | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls | Michael R. Rice | 2023-10-10 |
| 11647577 | Ionized gas vent to reduce on wafer static charge and particles | Narayanan Ramachandran, Devendra Channappa Holeyannavar | 2023-05-09 |
| 11640915 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Paul B. Reuter, Nir Merry, John C. Menk, Douglas B. Baumgarten | 2023-05-02 |
| 11621182 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Michael R. Rice, Jeffrey A. Brodine | 2023-04-04 |
| 11610794 | Side storage pods, equipment front end modules, and methods for operating the same | Paul B. Reuter, Nir Merry, John C. Menk, Douglas B. Baumgarten | 2023-03-21 |