Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11800824 | Low temperature silicon nitride/silicon oxynitride stack film with tunable dielectric constant | Maribel Maldonado-Garcia, Mihaela Balseanu | 2023-10-24 |
| 11732356 | Multilayer encapsulation stacks by atomic layer deposition | Mihaela Balseanu, Maribel Maldonado-Garcia, Ning Li, Mark Saly, Bhaskar Jyoti Bhuyan +2 more | 2023-08-22 |
| 11658025 | Chalcogen precursors for deposition of silicon nitride | Chandan Kr Barik, Michael Haverty, Muthukumar Kaliappan, Bhaskar Jyoti Bhuyan, John Sudijono +3 more | 2023-05-23 |