Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815436 | Detection of surface particles on chamber components with carbon dioxide | Zhili Zuo, Chang Ke, Song-Moon Suh | 2023-11-14 |
CW
Changgong Wang
Overall (2023): #483,202 of 537,848Top 90%
1
Patents 2023