Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784229 | Profile shaping for control gate recesses | Allison Yau, Sang Jin Kim, Zeqiong Zhao, Zhijun Jiang, Deenesh Padhi +1 more | 2023-10-10 |
| 11717866 | Etching metal-oxide and protecting chamber components | Dustin Zachary Austin, Alon Ganany, Daniel Boatright | 2023-08-08 |
| 11670516 | Metal-containing passivation for high aspect ratio etch | Karthik S. Colinjivadi, Samantha Tan, Shih-Ked Lee, George Matamis, Yongsik Yu +4 more | 2023-06-06 |
| 11646216 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Allison Yau, Zeqiong Zhao, Sang Jin Kim, Zhijun Jiang, Deenesh Padhi +1 more | 2023-05-09 |