Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670510 | Self aligned pattern formation post spacer etchback in tight pitch configurations | Lawrence A. Clevenger, Matthew E. Colburn, Nelson Felix, Sivananda K. Kanakasabapathy, Christopher J. Penny +2 more | 2023-06-06 |
| 11646221 | Self-aligned pattern formation for a semiconductor device | Lawrence A. Clevenger, Nelson Felix, Sivananda K. Kanakasabapathy, Christopher J. Penny, Nicole Saulnier | 2023-05-09 |
| 11610780 | Alternating hardmasks for tight-pitch line formation | Nelson Felix, Chi-Chun Liu, Yann Mignot, Stuart A. Sieg | 2023-03-21 |