Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658062 | Air gap spacer formation for nano-scale semiconductor devices | Kangguo Cheng, Thomas J. Haigh, Jr., Juntao Li, Sanjay C. Mehta, Son V. Nguyen +2 more | 2023-05-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658062 | Air gap spacer formation for nano-scale semiconductor devices | Kangguo Cheng, Thomas J. Haigh, Jr., Juntao Li, Sanjay C. Mehta, Son V. Nguyen +2 more | 2023-05-23 |