Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11818955 | Method for forming piezoelectric films on surfaces of arbitrary morphologies | Zhengbao Yang | 2023-11-14 |
| 11687697 | Method and system for correcting lithography process hotspots based on stress damping adjustment | Haiqing Wei, Hao Jiang | 2023-06-27 |
| 11662197 | Rapid measurement method for ultra-thin film optical constant | Honggang Gu, Simin Zhu, Baokun Song, Hao Jiang, Xiuguo Chen | 2023-05-30 |
| 11644413 | Method for measuring dielectric tensor of material | Honggang Gu, Baokun Song, Zhengfeng Guo, Mingsheng Fang, Hao Jiang +1 more | 2023-05-09 |
| 11619883 | Snapshot type overlay error measuring device and measuring method | Xiuguo Chen | 2023-04-04 |