Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662197 | Rapid measurement method for ultra-thin film optical constant | Honggang Gu, Shiyuan Liu, Simin Zhu, Baokun Song, Hao Jiang | 2023-05-30 |
| 11644413 | Method for measuring dielectric tensor of material | Honggang Gu, Baokun Song, Shiyuan Liu, Zhengfeng Guo, Mingsheng Fang +1 more | 2023-05-09 |
| 11619883 | Snapshot type overlay error measuring device and measuring method | Shiyuan Liu | 2023-04-04 |