Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11687697 | Method and system for correcting lithography process hotspots based on stress damping adjustment | Shiyuan Liu, Hao Jiang | 2023-06-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11687697 | Method and system for correcting lithography process hotspots based on stress damping adjustment | Shiyuan Liu, Hao Jiang | 2023-06-27 |