Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762279 | Mask blank, method for manufacturing reflective mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido | 2023-09-19 |
| 11720014 | Mask blank, phase shift mask, and method of manufacturing semiconductor device | Hitoshi Maeda, Hiroaki Shishido | 2023-08-08 |
| 11630388 | Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido | 2023-04-18 |