Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11762279 | Mask blank, method for manufacturing reflective mask, and method for manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo | 2023-09-19 |
| 11720014 | Mask blank, phase shift mask, and method of manufacturing semiconductor device | Hitoshi Maeda, Osamu Nozawa | 2023-08-08 |
| 11698360 | Chirality detection device, chirality detection method, separation device, separation method, and chiral substance device | Yoshihiko Togawa, Hiroshi Yamamoto | 2023-07-11 |
| 11630388 | Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo | 2023-04-18 |
| 11624979 | Mask blank, transfer mask, and method of manufacturing semiconductor device | Kazutake TANIGUCHI | 2023-04-11 |
| 11543744 | Mask blank, transfer mask, and method for manufacturing semiconductor device | — | 2023-01-03 |