Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11720014 | Mask blank, phase shift mask, and method of manufacturing semiconductor device | Osamu Nozawa, Hiroaki Shishido | 2023-08-08 |
| 11705361 | Method of manufacturing semiconductor device | Tatsuyoshi Mihara, Hiroki Shinkawata | 2023-07-18 |