Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664252 | Cleaning device, polishing device, and device and method for calculating rotation speed of substrate in cleaning device | Michiaki MATSUDA, Fuyuki Ogaki, Yusuke Watanabe, Junji Kunisawa | 2023-05-30 |
| 11626299 | Cover for swing member of substrate processing apparatus, swing member of substrate processing apparatus, and substrate processing apparatus | Yoshitaka Kitagawa, Tomoatsu Ishibashi | 2023-04-11 |