Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837477 | Washing device and washing method | — | 2023-12-05 |
| 11817311 | Substrate cleaning method and substrate cleaning apparatus | Hiroshi Ishikawa, Masumi Nishijima | 2023-11-14 |
| 11676827 | Substrate cleaning apparatus, substrate cleaning method, substrate processing apparatus, and substrate drying apparatus | — | 2023-06-13 |
| 11660643 | Substrate cleaning device and substrate cleaning method | — | 2023-05-30 |
| 11642704 | Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these | — | 2023-05-09 |
| 11626299 | Cover for swing member of substrate processing apparatus, swing member of substrate processing apparatus, and substrate processing apparatus | Yoshitaka Kitagawa, Hisajiro Nakano | 2023-04-11 |