Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664252 | Cleaning device, polishing device, and device and method for calculating rotation speed of substrate in cleaning device | Michiaki MATSUDA, Hisajiro Nakano, Yusuke Watanabe, Junji Kunisawa | 2023-05-30 |