Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796926 | Metrology system for examining objects with EUV measurement light | Klaus Gwosch | 2023-10-24 |
| 11774848 | Method and apparatus for repairing defects of a photolithographic mask for the EUV range | Hendrik Steigerwald | 2023-10-03 |