Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774848 | Method and apparatus for repairing defects of a photolithographic mask for the EUV range | Renzo Capelli | 2023-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774848 | Method and apparatus for repairing defects of a photolithographic mask for the EUV range | Renzo Capelli | 2023-10-03 |