Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796926 | Metrology system for examining objects with EUV measurement light | Renzo Capelli | 2023-10-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796926 | Metrology system for examining objects with EUV measurement light | Renzo Capelli | 2023-10-24 |