Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789367 | Facet mirror for an illumination optical unit of a projection exposure apparatus | Willi Anderl, Christian Körner, Markus Holz, Manuel Stompe, Stefan Seitz | 2023-10-17 |
| 11720028 | Measurement illumination optical unit for guiding illumination light into an object field of a projection exposure system for EUV lithography | Thomas Fischer, Lars Wischmeier, Michael Patra | 2023-08-08 |