Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11789367 | Facet mirror for an illumination optical unit of a projection exposure apparatus | Christian Körner, Hubert Holderer, Markus Holz, Manuel Stompe, Stefan Seitz | 2023-10-17 |