Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11720028 | Measurement illumination optical unit for guiding illumination light into an object field of a projection exposure system for EUV lithography | Thomas Fischer, Michael Patra, Hubert Holderer | 2023-08-08 |